The Scottish Microelectronics Centre at the University of Edinburgh. The cleanrooms are the housed in the low portion of the building. The offices and laboratories are located in the four storey portion with the rooms/laboratorieson the second and third floor being available for rental by external organisations.
Nikon i-line stepper system for sub-micron photolithography on 200mm substrates
The SMC is located in a purpose built facility at the University of Edinburgh's Science and Engineering campus at King's Buildings and consists of approximately 300m2 of class 10 cleanrooms and 1000m2 of office and laboratory space. Over 250m2 of the office and laboratory space in the building is available for rent to commercial organisations with the Institute for Integrated Micro and Nano Systems from the School of Engineering occupying the rest. Similarly, two of the cleanroom modules (64m2) have been designated for rental with the remaining areas containing fabrication and metrology equipment which can be made available for use by those associated with the Centre.
Advanced 200mm cluster tool for thin film deposition
The IMNS is one of a very small number of research groups within the UK with access to a comprehensive toolset for processing 200mm silicon wafers, the substrate size used in the majority of industrial cleanrooms. Much of this equipment is located in the class 10 cleanrooms (250m2) at the SMC with a further 250m2 of cleanrooms, ranging from class 100 to class 10,000, being used to house process technologies less susceptible to particulates. The facilities available are capable of post processing sub-micron CMOS as well as fabricating a wide-ranging set of non-silicon based microsystems.
Over 250m2 of the office and laboratory space in the building is available for rent to commercial organisations with the Institute of Integrated Micro and Nano Systems from the School of Engineering occupying the rest. Similarly, two of the cleanroom modules (64m2) are available for rental with the remaining areas containing fabrication and metrology equipment which can be made available for use by those associated with the Centre.
The original cleanrooms have been fully operational since 2001 (Photographs showing the SMC during construction can be viewed). For more details for those wishing to rent space or access facilities please contact Iain Hyslop (Email: Iain.Hyslop@ee.ed.ac.uk, Tel: 0131 650 7473).
Central WIP corridor that provides access to the eight class 10 cleanroom bays.
Cleanroom bay awaiting hookup of equipment. Each bay is serviced with extract, DI, town and chilled water, nitrogen, compressed air, power, gases and vacuum.
